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Bond-detach lithography: a method for micro/nanolithography by precision PDMS patterning.
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Bond-detach lithography: a method for micro/nanolithography by precision PDMS patterning.
Bond-detach lithography: a method for micro/nanolithography by precision PDMS patterning. Small. 2007 Jan; 3(1):132-8.
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subject areas
Chemical Phenomena
Chemistry
Crystallization
Dimethylpolysiloxanes
Gases
Hot Temperature
Macromolecular Substances
Materials Testing
Microchemistry
Molecular Conformation
Nanostructures
Nanotechnology
Nylons
Particle Size
Surface Properties
authors with profiles
Melody Swartz